Mass-spectrometry with inductively coupled plasma ion source is widely applied for the determination of elemental composition and isotope ratios of liquid and solid samples in geological, chemical, semiconductor and other technical sciences. It is a very flexible technique allowing to analyse the concentration of most elements of the periodic table down to a (sub)ppt-level in liquid samples and down to a (sub)ppb level in solid samples. It also allows for a high sample throughput and usually requires little sample preparation compared to the alternative techniques, such as TIMS or SIMS.